Results from the study of HFS detectors from RMD will be presented. Some of these sensors have been subjected to neutron irradiation at the Jožef Stefan Institute (Ljubljana, Slovenia). The fluences to which these were exposed are 3E13, 6E13, 3E14 and 1E15 n/cm^2. TCT and CV/IV measurements were performed on irradiated and unirradiated samples. The results obtained from these studies will be shown in this presentation.