Speaker
Description
Radio Frequency (RF) Inductively Coupled Plasmas (ICPs) have been utilized in the wide variety of fields, e.g., material processing [1], accelerator [2], fusion [3]. Although such RF-ICPs play important roles in their fields, the operation of the RF-ICPs is difficult to control because of the complexity of their discharge process. In the previous work, an ElectroMagnetic Particle in Cell Monte Carlo Collision (EM PIC-MCC) code has been developed to obtain the insight of such complex discharge process of RF-ICP. The code is able to track the dynamics of the charged particles (e
Acknowledgement
The present study investigates the dynamics of ions in the RF-ICP discharge with some upgrades, e.g.,
References
[1] J. Hopwood, Plasma Sources Sci. Technol.
[2] J. Lettry, et. al., Rev. Sci. Instrum.
[3] U. Fantz, et. al., Nucl. Fusion
[4] T. Hayami, et. al., AIP Conf. Proc.
[5] S. Mochizuki, et. al., AIP Conf. Proc.
[6] S. Mattei, et. al., Plasma Sources Sci. & Technol.
[7] K. Nishida, et. al., J. Appl. Phys.