Speaker
Dr
Mi-Sook Won
(Korea Basic Science Institute (KBSI))
Description
VIBA (Versatile Ion Beam Accelerator) is a compact linear accelerator facility using 28 GHz ECR ion source at KBSI (Korea Basic Science Institute). The goal of VIBA is to support various researchers using low-energy ion beams. During the year, diagnosis system of VIBA was changed for ion implantation. Ion implantation chamber was separated from the conventional diagnostic chamber for improving ion implantation. We performed ion implantation on silicon wafers with several ions and energies, and measured the depth profile of each sample using a surface analysis instrument. Experimental results were compared with simulations performed using SRIM 2013 code. Characteristics of ion implantation using ECRIS will be reported.
Primary authors
Dr
Mi-Sook Won
(Korea Basic Science Institute (KBSI))
Dr
Jin Yong Park
(Korea Basic Science Institute (KBSI))
Mr
Jungbae Bahng
(Kyungpook National University )
Jonggi Hong
(Korea Basic Science Institute (KBSI))
Dr
Seong Jun Kim
(Korea Basic Science Institute (KBSI))
Dr
Jang-Hee Yoon
(Korea Basic Science Institute (KBSI))
Dr
Jung-Woo Ok
(Korea Basic Science Institute (KBSI))
Dr
Jong-Seong Bae
(Korea Basic Science Institute (KBSI))
Dr
Tae Eun Hong
(Korea Basic Science Institute (KBSI))
Dr
Byoung Seob Lee
(Korea Basic Science Institute (KBSI))
