Speaker
Kai Nordlund
(University of Helsinki)
Description
After initiation of an arc, the plasma forming it must be fed by sputtering. The basic mechanisms of sputtering in the linear cascade regime are well understood from decades of theory and computer simulation development. However, under an electrical arc, the surface is either hot or molten, the plasma bombardment intensity very high, and the surface may have nanosize protrusions.
The mechanisms of sputtering under such extreme conditions have started to become clear only recently.
In this presentation, we review the knowledge of sputtering from heat spikes, nanostructures and the highly heated surface regimes, and present results of a recent systematic study of high-temperature sputtering of Cu.
Primary authors
Kai Nordlund
(University of Helsinki)
Flyura Djurabekova
(University of Helsinki)
