11–16 Dec 2022
Australia/Adelaide timezone
Co-locating with the 7th International Workshop of Specialty Optical Fibres and Their Applications (WSOF), the Australian and New Zealand Conference on Optics and Photonics (ANZCOP), and the Conference on Optoelectronlc and Microelectronic Materials and Devices (COMMAD)

Fabrication challenges towards realization of MEMS-enabled spectrally tunable metasurface filter for long-wavelength infrared

12 Dec 2022, 16:45
15m
Room R7 (Adelaide Convention Centre)

Room R7

Adelaide Convention Centre

Talk (preferred) COMMAD: Semiconductor materials, devices, and technologies Conference on Optoelectronic and Microelectronic Materials and Devices

Speaker

Oleg Bannik (The University of Western Australia)

Description

We discuss fabrication challenges to realize plasmonic MEMS-enabled tunable LWIR filter consisting of a suspended perforated gold membrane with a vertically actuated thin silicon structure above it.

Authors

Dhirendra Kumar Tripathi (The University of Western Australia) Fedor Kovalev Hemendra Kala (The University of Western Australia) Ilya Shadrivov (Australian National University) Lorenzo Faraone (The University of Western Australia) Mariusz Martyniuk Michal Zawierta Mingkai Liu (The Australian National University) Oleg Bannik (The University of Western Australia)

Presentation materials