Speaker
Oleg Bannik
(The University of Western Australia)
Description
We discuss fabrication challenges to realize plasmonic MEMS-enabled tunable LWIR filter consisting of a suspended perforated gold membrane with a vertically actuated thin silicon structure above it.
Authors
Dhirendra Kumar Tripathi
(The University of Western Australia)
Fedor Kovalev
Hemendra Kala
(The University of Western Australia)
Ilya Shadrivov
(Australian National University)
Lorenzo Faraone
(The University of Western Australia)
Mariusz Martyniuk
Michal Zawierta
Mingkai Liu
(The Australian National University)
Oleg Bannik
(The University of Western Australia)