Speaker
Dr
Richard Bates
(University of Glasgow)
Description
The different process stages required to fabricate a 3D detector is described. As a consequence of this a non-standard silicon detector manufacture was identified as a potential vendor. A detailed description of the process flow is presented followed by a discussion of process optimization. The first results of devices from the company are shown and lessons learnt expanded upon. From these results a new process flow has been developed which is shown.
Primary author
Dr
Richard Bates
(University of Glasgow)
Co-authors
Dr
Celeste Fleta
(University of Glasgow)
Dr
Chris Parkes
(University of Glasgow)
Dr
David Pennicard
(University of Glasgow)
