Speaker
Sabina Ronchin
(Fondazione Bruno Kessler)
Description
We report on the joint INFN ATLAS-CMS R&D program, in collaboration with FBK, aimed at the development of pixel sensors for the phase 2 upgrade of the LHC (HL-LHC).
In this talk we describe the development of the main technological steps allowing for the fabrication of a new generation of Si 3D pixel detectors with small pixel and thin active thickness. In particular, we report on the results of the process tests carried out at FBK in order to optimize the etching by DRIE and the filling (at least partial) with poly-Si of narrow (5 micron) columnar electrodes.
Author
Sabina Ronchin
(Fondazione Bruno Kessler)
Co-authors
Gabriele Giacomini
(Fondazione Bruno Kessler)
Prof.
Gian-Franco Dalla Betta
(INFN and University of Trento)
Maurizio Boscardin
(FBK Trento)
Nicola Zorzi
(Fondazione Bruno Kessler - FBK)
