Feb 18 – 22, 2019
Vienna University of Technology
Europe/Vienna timezone

Production and performance study of Diamond-Like Carbon for the resistive electrode in MPGD application

Not scheduled
Vienna University of Technology

Vienna University of Technology

Gusshausstraße 27-29, 1040 Wien
Board: 22
Poster Gaseous Detectors Poster Session A


Dr You Lyu (University of Science and Technology of China (CN))


Diamond-like Carbon (DLC), a newly recognized resistive material, is a kind of metastable amorphous carbon material. DLC has recently received considerable attention and is increasingly exploited in resistive electrodes to suppress discharges in Micro-Pattern Gaseous Detector (MPGD). DLC coating provided a new method to produce high-quality resistive electrodes for MGPDs owing to it’s low dielectric constant, wide band gap, good chemical and thermal stability. Many studies and optimizations on DLC production process is carried out with Magnetron Sputtering Technology to get applicable DLC resistive electrodes. Two different electrode structures (DLC/APICAL and Cu/DLC/APICAL) have been produced and tested in Micro-Resistive WELL (μRWELL) detectors. The design, farbrication and test of a standard μRWELL detector using DLC/APICAL structure were performed. A spatial resolution of better than 70 μm in both dimensions was achieved while maintaining the detection efficiency higher than 95%. The rate capability (measured with 8 keV copper target X-rays) reaches 100 kHz/cm2 when the gas gain is 8000. More studies to further improve rate capability with multi-point grounding method by using Cu covered DLC (Cu/DLC/APICAL) are also presented.

Primary author

Dr You Lyu (University of Science and Technology of China (CN))


Yi Zhou (University of Science and Technology of China (CN)) Jianbei Liu (University of Science and Technology of China (CN)) Zhiyong Zhang (University of Science and Technology of China (CN)) Prof. Ming Shao (University of Science and Technology of China)

Presentation materials