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In this study we report on PVD deposition of Nb3Sn sputtered directly from an alloy target at elevated temperature about 600 °C with and without of interlayer of thick Nb layer deposited on copper substrate producing a multilayer of Cu/Nb/Nb3Sn and Cu/Nb3Sn.
The dependence of superconducting properties of the total structure on deposition parameters is been determined. The films have been characterized via, SIMS, RBS, SEM, XRD, EDX, measurements and SQUID magnetometer. RF properties was examined with choke cavity at 7.8 GHz.
Analysis showed that the composition in both room and elevated temperature was within the desired stoichiometry of 24–25 at%, however the superconducting properties was only observed for elevated temperature deposition or post annealing at 650 °C. The critical temperature was determined to be in the range of 16.8 to 17.4 K
