11th International Workshop on Thin Films and New Ideas for Pushing the Limits of RF Superconductivity - TFSRF2024

Session

Deposition modeling

16 Sept 2024, 14:30

Auditorium Joliot-Curie (Bat. 100, Université Paris-Saclay, France)

53. EQP energy and mass analyser

Dr Stephane Simon

16/09/2024, 14:30

Deposition modeling

"Magnetron sputtering (MS) is a common technique used for the production of thin films. In such process, the sputtered ions are ejected from the target material with high kinetic energy and deposited onto the substrate to form the coating. This result in an energy transfer between the bombarding particles and substrate, affecting film growth or crystallization.
While DC and pulse DC are...

54. Reducing the Thermal Effects during Coating of SRF Cavities: A Case Study for Atomic Layer Deposition of Alumina with a Combined Numerical and Experimental Approach

Getnet Kacha Deyu

16/09/2024, 14:53

Deposition modeling

Coating the inner surface of superconducting radio frequency (SRF) cavities is one of the approaches to push ultimate limits in next generation accelerators. One of the potential coating techniques for such intricate and large volume structures is atomic layer deposition (ALD), as it offers full and uniform layer coverage. In order to predict the process parameters for coating SRF cavities on...