Speaker
Description
This study aims to assess the quality of PEALD-based SIS films and involves several steps to show significant correlations between different measurement results. The growth per cycle is determined by XRR, from which the respective thicknesses of the PEALD-coated thin films are derived. The results are used to determine the London penetration depth λL of a thin superconducting NbTiN layer during a LE-µSR measurement. The penetration depth is further used to predict the theoretical superheating field Hsh and the optimal value for the maximum applied magnetic field that multilayer-coated niobium can withstand. The investigation of the magnetic flux expulsion of multilayer-coated Nb samples, presented by D. Turner et al., shows that post-deposition annealed thin films exhibit tremendous magnetic flux expulsion even if they do not achieve a high critical temperature Tc due to presumed oxygen diffusion. Further Tc measurements on SIS-coated Nb and Si samples yield the maximum value of Tc,NbTiN = 15.96K, which is the highest value of such thin films coated by ALD ever measured. All these results contribute to the understanding of the underlying theoretical model, predictions for SIS multilayer films and their potential in future applications.