May 24 – 28, 2021
America/Vancouver timezone

Passive CMOS Strip Sensors with Multiple Stitching

May 25, 2021, 5:00 AM
Poster Sensors: Solid-state position sensors Sensor Posters: SS Position


Ulrich Parzefall (Albert Ludwigs Universitaet Freiburg (DE)) Arturo Rodriguez Rodriguez (Albert Ludwigs Universitaet Freiburg (DE))


Two current issues with Silicon particle sensors are the high cost, making them a cost driver, and the limited availability from only a few manufacturers. Most CMOS foundries are equipped for producing small chips only. To obtain larger sensors as required in strip trackers, reticles have to be connected by stitching. In our study, passive strip sensors were developed in p-CMOS 150 nm technology on a 150 𝜇m thick wafer and produced by a European manufacturer. Stitching of up to 5 different reticles was used. Sensors were characterised on probe stations and then tested in the lab with Sr-90 sources and IR-lasers. We will present position-resolved signal measurements to evaluate the sensor performance. Results from 2 batches of sensors are shown in this study, with an improved backside processing on the 2nd batch of sensors to enhance the HV performance of the initial batch. We are able demonstrate that the sensors perform well and stitching does not show negative effects.

TIPP2020 abstract resubmission? No, this is an entirely new submission.

Primary authors

Ulrich Parzefall (Albert Ludwigs Universitaet Freiburg (DE)) Marta Baselga (Deutsches Elektronen-Synchrotron (DE)) Leena Diehl (Albert Ludwigs Universitaet Freiburg (DE)) Ingrid-Maria Gregor (DESY & Bonn University) Tomasz Hemperek (University of Bonn (DE)) Jan Cedric Honig (Albert Ludwigs Universitaet Freiburg (DE)) Sven Mägdefessel (University Freiburg) Arturo Rodriguez Rodriguez (Albert Ludwigs Universitaet Freiburg (DE)) Surabhi Sharma (Deutsches Elektronen-Synchrotron (DE)) Dennis Sperlich (Albert Ludwigs Universitaet Freiburg (DE)) Tianyang Wang (University of Bonn (DE)) Liv Wiik-Fuchs (Albert Ludwigs Universitaet Freiburg (DE))

Presentation materials