Speaker
Dr
Marco Povoli
(SINTEF MiNaLab)
Description
SINTEF in collaboration with University of Oslo have been performing R&D activities on 3D detectors with the aim to qualify to be a production site for ITk upgrade. In this context, a 3D detector fabrication run has been completed recently with very promising results. Various sensor geometries with active edges were implemented, and the fabrication was carried out on 6-inch Si-Si wafers with sensor substrate thicknesses of 100 µm and 50 µm using single-sided processing approach. We will present the electrical test results; assembly, irradiation and test beam plans; and the plans for the next fabrication run.
Author
Ozhan Koybasi
(SINTEF)
Co-authors
Dr
Marco Povoli
(SINTEF MiNaLab)
Angela Kok
(SINTEF)
Dr
Anand Summanwar
(SINTEF)
Dr
Lars Breivik
(SINTEF)
Mr
Trond Hansen
(SINTEF)
Mr
Nicolas Lietaer
(SINTEF)
Ole Rohne
(University of Oslo (NO))
Heidi Sandaker
(University of Oslo (NO))